ナノテスティングシンポジウム

Annual Nano Testing Symposium

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NANOTS2019

Special Sessions

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Special Invited Talk (KFC Hall)

The following special invited talk will be given.

16:35–17:35, Monday, 18 November 2019
"Reliability in the railway system" by P.E.jp(Mechanical Engineering) Hiroshi NOMOTO, Railway Systems Business Unit, Hitachi, Ltd.

Invited Talk

The following invited talks will be given.

9:00–10:00, Tuesday, 19 November 2019 (KFC Hall)
"R&D of 3D-IC Technology Contributes to AI/IoT Society" by Dr. Katsuya KIKUCHI, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Science and Technology (AIST).
13:20–14:10, Tuesday, 19 November 2019 (KFC Hall 2nd)
"Extending nanoimprint lithography to 1xnm nodes and expectations for metrology" by Dr. Keita SAKAI, Semiconductor Production Equipment PLM Center 3, Canon Inc.

Panel Discussion (KFC Hall)

A panel discussion on "Image analysis using deep learning" will be held in 16:30– 17:50 on Tuesday, 19 November 2019 in the conference hall (KFC Hall on 3F).

Poster Session

A poster session will be held on Monday, 18 November 2019, 17:35—-18:30 in KFC Hall Foyer on 3F. Short (1min) oral presentation of the poster session papers will be given on Monday, 18 November 2019, 12:36–12:40 in the conference hall.

Authors Corner

Authors corner, a place for audience to meet with and discuss with authors, will be given just after the sessions (except for special and commercial sessions) in KFC Hall Foyer.

Evening Session

Evening session of NANOTS is a special session for discussing on research trend around the world and the future perspective. The session will be held on the Monday, 18 November 18:30–20:30 in KFC Hall.

Exhibition and Commercial Session

The Symposium will feature the latest in service providers, equipment manufacturers and suppliers. A large exhibit floor will give the opportunity to key-vendors to represent the core business area in these fields. Furthermore, a commercial session will give the opportunity to introduce new products with short presentation.

Luncheon Seminar

Luncheon seminars will be given in lunch break time on Monday, 18 November. You must pre-register to attend the seminar. In some cases, your registration may not be accepted because of a business policy of the sponsor.

Hitachi High-Technologies Luncheon Seminar: Monday, 18 November

Theme
Introduction of electron microscopes for semiconductor analysis provided by Hitachi High-Technologies
Abstract
The front line of Hitachi High-Technologies microscope technology for semiconductor defect analysis is introduced.