Atmospheric scanning electron microscopy for bulk material observation
Y. Ominami(a; A. Hisada(b; K. Nakahira(c; M. Nakabayashi(a; M. Shoji(a; M. Yoshihara(a, and S. Ito(a
a)Science Systems Product Div., Hitachi High-Technologies Corp.; b)R&D Group Center for Healthcare Innovation, Hitachi Ltd.; c)R&D Group Center for Production Engineering, Hitachi Ltd.
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